Publication:
Conformal doping of FINFET's: a fabrication and metrology challenge
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1 since deposited on 2021-10-17
Acq. date: 2025-10-23
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1915 since deposited on 2021-10-17
Acq. date: 2025-10-23
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1 since deposited on 2021-10-17
Acq. date: 2025-10-23
Views
1915 since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations