Publication:

Conformal doping of FINFET's: a fabrication and metrology challenge

Date

2008
Proceedings Paper
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Author(s)

Vandervorst, Wilfried  
;
Everaert, Jean-Luc
;
Rosseel, Erik  
;
Jurczak, Gosia  
;
Hoffmann, Thomas
;
Eyben, Pierre  
;
Mody, Jay
;
Zschaetzsch, Gerd
;
Koelling, Sebastian
;
Gilbert, Matthieu
;
Poon, T.
;
del Agua Borniquel, Jose Ignacio  
;
Foad, M.
;
Duffy, Ray
;
Pawlak, Bartek  

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