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Conformal doping of FINFET's: a fabrication and metrology challenge
Publication:
Conformal doping of FINFET's: a fabrication and metrology challenge
Date
2008
Proceedings Paper
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16930.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
;
Everaert, Jean-Luc
;
Rosseel, Erik
;
Jurczak, Gosia
;
Hoffmann, Thomas
;
Eyben, Pierre
;
Mody, Jay
;
Zschaetzsch, Gerd
;
Koelling, Sebastian
;
Gilbert, Matthieu
;
Poon, T.
;
del Agua Borniquel, Jose Ignacio
;
Foad, M.
;
Duffy, Ray
;
Pawlak, Bartek
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1
since deposited on 2021-10-17
Acq. date: 2025-10-23
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1915
since deposited on 2021-10-17
Acq. date: 2025-10-23
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Downloads
1
since deposited on 2021-10-17
Acq. date: 2025-10-23
Views
1915
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations