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Browsing by Author "Fompereyne, Jean"

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    MOSFET with La2HfO7 and HfO2 high-k dielectrics integrated in a conventional flow

    Pantisano, Luigi
    ;
    Conard, Thierry  
    ;
    Claes, Martine  
    ;
    Demand, Marc  
    ;
    Deweerd, Wim
    ;
    De Gendt, Stefan  
    Oral presentation
    2005, MRS Spring Meeting Symposium G: Advanced Gate Dielectric Stacks on High-Mobility Semiconductors

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