Publication:

MOSFET with La2HfO7 and HfO2 high-k dielectrics integrated in a conventional flow

Date

2005
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Author(s)

Pantisano, Luigi
;
Conard, Thierry  
;
Claes, Martine  
;
Demand, Marc  
;
Deweerd, Wim
;
De Gendt, Stefan  
;
Heyns, Marc  
;
Houssa, Michel  
;
Aoulaiche, Marc
;
Lujan, Guilherme
;
Ragnarsson, Lars-Ake  
;
Rohr, Erika
;
Schram, Tom  
;
Hooker, Jacob
;
Rittersma, Chris
;
Fompereyne, Jean
;
Locquet, Jean-Pierre
;
dimoulas, A.

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1952 since deposited on 2021-10-16
Acq. date: 2025-10-23

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1952 since deposited on 2021-10-16
Acq. date: 2025-10-23

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