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Browsing by Author "Fonda, E."

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    Study of chemical vapor deposition of manganese on porous SiCOH low-k dielectrics using Bis(ethylcyclopentadienyl)manganese

    Jourdan, Nicolas  
    ;
    Krishtab, Mikhail  
    ;
    Baklanov, Mikhaïl
    ;
    Meersschaut, Johan  
    ;
    Wilson, Chris  
    Journal article
    2012, Electrochemical and Solid-State Letters, (15) 5, p.H176-H178

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