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Browsing by Author "Fong Choi, Yin"

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    Today's scorecard for tomorrow's photoresist: progress and outlook towards High-NA EUV lithography

    Santaclara, Jara G
    ;
    Rispens, Gijsbert  
    ;
    Bekaert, Joost  
    ;
    Thiam, Arame  
    ;
    Maslow, Mark
    Proceedings paper
    2021, Advances in Patterning Materials and Processes XXXVIII, 21/02/2021, p.1161204

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