Browsing by Author "Foucher, Johann"
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication Development of a comprehensive metrology software platform dedicated to block copolymers thin film nanopatterns
Proceedings paper2015, 1st International Symposium on DSA, 26/10/2015Publication Next generation of decision making software for nanopatterns metrology: application to semiconductor industry
Proceedings paper2016, Metrology, Inspection, and Process Control for Microlithography XXX, 21/02/2016, p.977836