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    Pressure Sensor Devices Featuring a Chemical Passivation Made of a Locally Synthesized Diamond Layer

    Baehr, Mario
    ;
    Kaepplinger, Indira
    ;
    Pobedinskas, Paulius  
    ;
    Frank, Thomas
    ;
    Gruen, Andre
    Journal article
    2023, PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, (220) 4, p.Art. 2200309

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