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Browsing by Author "Franssila, Samuli"

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    Dual silicide technology: WSix polycide gate and self-aligned CoSi2 source/drain

    Franssila, Samuli
    ;
    Palmans, Roger
    ;
    Stone, M.
    ;
    Maex, Karen  
    Proceedings paper
    1994, 24th European Solid State Device Research Conference - ESSDERC, 11/09/1994, p.287-290

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