Publication:

Dual silicide technology: WSix polycide gate and self-aligned CoSi2 source/drain

Date

1994

Proceedings Paper

Simple item page Full metadata Statistics

Files

155.pdf 340.2 KB

Author(s)

Franssila, Samuli

;

;

;

Statistics

2006 since deposited on 2021-09-29

Acq. date: 2026-06-06