Publication:
Dual silicide technology: WSix polycide gate and self-aligned CoSi2 source/drain
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2009 since deposited on 2021-09-29
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Acq. date: 2026-08-08
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Statistics
Views
2009 since deposited on 2021-09-29
3last month
1last week
Acq. date: 2026-08-08
Citations