Browsing by Author "Freed, Regina"
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Publication Demonstration of lithography patterns using reflective e-beam direct write
Proceedings paper2011, Alternative Lithographic Technologies III, 27/02/2011, p.79701TPublication Fabrication of a micro-lens array for Reflective Electron Beam Lithography
Proceedings paper2011, International Conference on Solid State Devices and Materials - SSDM, 28/09/2011