Publication:

Fabrication of a micro-lens array for Reflective Electron Beam Lithography

Date

2011
Proceedings Paper
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Author(s)

Vereecke, Bart  
;
Haspeslagh, Luc  
;
Lazzarino, Frederic  
;
Miller, Andy  
;
Kellens, Kristof  
;
Dekkers, Harold  
;
Freed, Regina
;
Grella, L.

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1891 since deposited on 2021-10-19
Acq. date: 2025-10-29

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