Browsing by Author "French, Roger H."

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High refractive index fluid evaluations: fluid radiation durabilitylifetimes and fluid/resist interactions

French, Roger H.
;
Bernfeld, Adam S.
;
Tran, Hoang V.
;
Adelman, Douglas J.
;
Liberman, Vladimir
Proceedings paper
2008, 5th International Symposium on Immersion Lithography Extensions, 22/09/2008
High-index immersion fluids enabling cost-effective single-exposure lithography for 32nm half pitches

French, Roger H.
;
Tran, Hoang V.
;
Adelman, Doug J.
;
Rogado, Nyrissa S.
;
Kaku, Mureo
Proceedings paper
2008, Optical Microlithography XXI, 24/02/2008, p.692417