Browsing by Author "Frickinger, J."

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Approach for a standardized methodology for multisite processing of 300-mm wafers at R&D sites

Oechsner, Richard
;
Pfeffer, M.
;
Frickinger, J.
;
Schellenberger, M.
;
Roeder, G.
;
Pfitzner, L.
Journal article
2007, IEEE Trans. Semiconductor Manufacturing, (20) 3, p.215-221
Management of metallic contamination in advanced IC manufacturing

Besson, P.
;
Bigot, C.
;
Grouillet, A.
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Joly, J.P.
;
Claes, Martine
;
Bearda, Twan
;
Frickinger, J.
Proceedings paper
2005, Cleaning Technology in Semiconductor Device Manufacturing IX, 16/10/2005, p.3-11