Browsing by Author "Fruehauf, Jens"
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Publication An (un)solvable problem in SIMS: B-interfacial profiling
Journal article2003, Applied Surface Science, 203-204, p.371-376Publication Assessment of the near-surface profiling capabilities of SIMS
Meeting abstract2003, Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., 27/04/2003, p.165Publication Characterization of the B and As pile-up at the Si-SiO2 interface
Proceedings paper2003, Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., 27/04/2003, p.399-404Publication Effect of implant oxide on ultra-shallow junction formation
Journal article2002, Journal of Vacuum Science & Technology B, (20) 6, p.2225-2228Publication Effect of implant oxide on ultra-shallow junction formation
Proceedings paper2001, 6th Int. Workshop on Fabrication, Characterization and Modeling of Ultra-Shallow Doping Profiles in Semiconductors - USJ, 22/04/2001, p.255-260Publication Electrical activity of B and As segregated at the Si-SiO2 interface
Proceedings paper2002, Silicon Front-End Junction Formation Technologies, 1/04/2002, p.C3.4Publication Interfacial B-profiling: an (un)solvable problem with SIMS
Oral presentation2002, SIMS-US WorkshopPublication Near-surface B/As profiling with SIMS: (in)solvable problems?
Meeting abstract2003, International Conference on Secondary Ion Mass Spectrometry - SIMS XIV, 14/09/2003, p.233Publication (Un)solvable problems in SIMS
Oral presentation2001, 13th International Conference on Secondary Ion Mass Spectrometry - SIMS 13; 11-16 November 2001; Nara, Japan.