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Browsing by Author "Fu, Yeh Sin"

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    Improved resolution with main chain scission resists for EUV lithography

    Shirotori, Akihide
    ;
    Hoshino, Manabu
    ;
    Rathore, Ashish  
    ;
    Fu, Yeh Sin
    ;
    De Simone, Danilo  
    Proceedings paper
    2022, Conference on Advances in Patterning Materials and Processes XXXIX Part of SPIE Advanced Lithography and Patterning Conference, APR 24-MAY 27, 2022, p.Art. 120550E

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