Improved resolution with main chain scission resists for EUV lithography

Simple item page Full metadata Statistics

Author(s)

Shirotori, Akihide

;

Hoshino, Manabu

;

Rathore, Ashish

;

;

De Simone, Danilo

;

Vandenberghe, Geert

;

Matsumoto, Hirokazu

Journal

Proceedings of SPIE

Metrics

1200 since deposited on 2022-09-10

Acq. date: 2025-10-25