Browsing by Author "Fujikawa, Makoto"
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Publication Gas phase pore stuffing for the protection of organo-silicate glass dielectric materials
Proceedings paper2018, 2018 International Symposium on Semiconductor Manufacturing - ISSM, 10/12/2018, p.1-3Publication Novel volatile film for the protection of organo-silicate glass dielectric materials
Publication Use of a thermally degradable chemical vapor deposited polymer film for low damage plasma processing of highly porous dielectrics
Journal article2019, ACS Applied Electronic Materials, (1) 12, p.2602-2611