Publication:
Use of a thermally degradable chemical vapor deposited polymer film for low damage plasma processing of highly porous dielectrics
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2066 since deposited on 2021-10-27
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Acq. date: 2026-07-22
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Statistics
Views
2066 since deposited on 2021-10-27
1last month
1last week
Acq. date: 2026-07-22
Citations