Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Fukuzawa, A."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Highly reliable Cu/ULK integratrion scheme using MHM and low-k capping film

    Tsutsue, Makoto
    ;
    Travaly, Youssef
    ;
    Ikeda, Atsushi
    ;
    Tokei, Zsolt  
    ;
    Willegems, Myriam  
    Oral presentation
    2007, Advanced Metallization Conference - AMC

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings