Publication:

Highly reliable Cu/ULK integratrion scheme using MHM and low-k capping film

Date

2007
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Author(s)

Tsutsue, Makoto
;
Travaly, Youssef
;
Ikeda, Atsushi
;
Tokei, Zsolt  
;
Willegems, Myriam  
;
Struyf, Herbert  
;
Sinapi, Fabrice
;
Richard, Olivier  
;
Kemeling, Nathan  
;
De Roest, David  
;
Fukuzawa, A.
;
Matsuki, N.
;
Sprey, Hessel  
;
Beyer, Gerald  

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