Browsing by Author "Fung, H.-S."
Now showing 1 - 1 of 1
- Results Per Page
- Sort Options
Publication The effects of vacuum-ultraviolet radiation on defects in low-k organosilicate glass
;Xue, P. ;Pei, D. ;Zheng, H. ;Li, W.; ;Baklanov, MikhaïlJournal article2016, Thin Solid Films, 616, p.23-26