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Browsing by Author "Furutani, Hajime"

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    Improving polymethacrylate EUV resists with TiO2 area-selective deposition

    Nye, Rachel  
    ;
    Van Dongen, Kaat  
    ;
    Oka, Hironori
    ;
    Furutani, Hajime
    ;
    Parsons, Gregory
    Proceedings paper
    2022, Conference on Advances in Patterning Materials and Processes XXXIX Part of SPIE Advanced Lithography and Patterning Conference, APR 24-MAY 27, 2022, p.120550C

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