Browsing by Author "Furutani, Hajime"
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Publication Improving polymethacrylate EUV resists with TiO2 area-selective deposition
Proceedings paper2022, Conference on Advances in Patterning Materials and Processes XXXIX Part of SPIE Advanced Lithography and Patterning Conference, APR 24-MAY 27, 2022, p.120550C