Browsing by Author "Fusi, Matteo"
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Publication Al2O3 stacks on In0.53Ga0.47As substrates: In situ investigation of the interface
Journal article2011, Microelectronic Engineering, (88) 4, p.435-439Publication Effects of surface passivation during atomic layer deposition of Al2O3 on In0.53Ga0.47As substrates
Journal article2011, Microelectronic Engineering, (88) 4, p.431-434