Publication:
Effects of surface passivation during atomic layer deposition of Al2O3 on In0.53Ga0.47As substrates
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1899 since deposited on 2021-10-19
3last week
Acq. date: 2025-10-29
Citations
Metrics
Views
1899 since deposited on 2021-10-19
3last week
Acq. date: 2025-10-29
Citations