Publication:
Effects of surface passivation during atomic layer deposition of Al2O3 on In0.53Ga0.47As substrates
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1908 since deposited on 2021-10-19
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Acq. date: 2026-10-07
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Statistics
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1908 since deposited on 2021-10-19
2last month
2last week
Acq. date: 2026-10-07
Citations