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Effects of surface passivation during atomic layer deposition of Al2O3 on In0.53Ga0.47As substrates
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Effects of surface passivation during atomic layer deposition of Al2O3 on In0.53Ga0.47As substrates
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Date
2011
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lamagna, Luca
;
Fusi, Matteo
;
Spiga, Sabina
;
Fanciulli, Marco
;
Brammertz, Guy
;
Merckling, Clement
;
Meuris, Marc
;
Molle, Alessandro
Journal
Microelectronic Engineering
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1902
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Views
1902
since deposited on 2021-10-19
3
last month
1
last week
Acq. date: 2025-12-09
Citations