Browsing by Author "Gan, Nobuko"
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Publication Dissolution of germanium in sulfuric acid based solutions
Proceedings paper2015, 14th International Symposium On Semiconductor Cleaning Science And Technology - SCST 14, 11/10/2015, p.277-284Publication Effect of dilute hydrogen peroxide in ultrapure water on SiGe epitaxial process
Proceedings paper2016, Ultra Clean Processing of Semiconductor Surfaces XIII, 11/09/2016, p.27-30Publication Functional water solutions to enable advanced wet cleaning process for next generation semiconductor device manufacturing
Meeting abstract2021, Ultrapure Micro 2021 Annual Conference, 3-5 November 2021Publication Impact of hydrogen peroxide in ultrapure water
Publication Study of cobalt etch control by pH and oxidizer
Meeting abstract2018, Surface Preparation and Cleaning Conference - SPCC, 9/04/2018Publication Study on Alternative Dipole Material Wet Clean by pH Controlled Functional Water
Proceedings paper2023-08, UCPSS - 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, September 2023, p.69-73