Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Functional water solutions to enable advanced wet cleaning process for next generation semiconductor device manufacturing
Publication:
Functional water solutions to enable advanced wet cleaning process for next generation semiconductor device manufacturing
Copy permalink
Date
2021
Meeting abstract
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Iino, Hideaki
;
Tanaka, Yoichi
;
Gan, Nobuko
;
Fukui, Takeo
;
Akanishi, Yuya
;
Iwahata, Shota
;
Oniki, Yusuke
;
Altamirano Sanchez, Efrain
;
Holsteyns, Frank
Journal
n/a
Abstract
Description
Metrics
Views
1953
since deposited on 2021-12-01
2
last month
1
last week
Acq. date: 2025-12-12
Citations
Metrics
Views
1953
since deposited on 2021-12-01
2
last month
1
last week
Acq. date: 2025-12-12
Citations