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Browsing by Author "Ganeshkumar, S."

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    Raising oxide: nitride selectivity to aid in the CMP of shallow trench isolation type applications

    Mills, C. R.
    ;
    Grover, G. S.
    ;
    Mueller, B. L.
    ;
    Steckenrider, J. S.
    ;
    Ganeshkumar, S.
    ;
    Leach, G. W.
    Proceedings paper
    1997, Proceedings 2nd International Chemical-Mechanical Polish (C.M.P.) for ULSI Multilevel Interconnection Conference - CMP-MIC, 13/02/1997, p.179-185

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