Browsing by Author "Ganeshkumar, S."
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Publication Raising oxide: nitride selectivity to aid in the CMP of shallow trench isolation type applications
;Mills, C. R. ;Grover, G. S. ;Mueller, B. L. ;Steckenrider, J. S. ;Ganeshkumar, S.Leach, G. W.Proceedings paper1997, Proceedings 2nd International Chemical-Mechanical Polish (C.M.P.) for ULSI Multilevel Interconnection Conference - CMP-MIC, 13/02/1997, p.179-185