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Browsing by Author "Gaskinsc, John"

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    Thermal conductivity of underlayers for EUV lithography and its effect on sensitivity of metal oxide resist

    Fallica, Roberto  
    ;
    De Simone, Danilo  
    ;
    Hopkins, Patrick E.
    ;
    Jones, Andrew
    ;
    Gaskinsc, John
    Proceedings paper
    2025, 2025 Conference on Optical and EUV Nanolithography, FEB 24-27, 2025

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