Publication:

Thermal conductivity of underlayers for EUV lithography and its effect on sensitivity of metal oxide resist

Date

2025
Proceedings Paper
https://doi.org/10.1117/12.3051713
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Author(s)

Fallica, Roberto  
;
De Simone, Danilo  
;
Hopkins, Patrick E.
;
Jones, Andrew
;
Gaskinsc, John

Journal

Proceedings of SPIE

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47 since deposited on 2025-07-31
1last month
Acq. date: 2026-05-25

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