Publication:
Thermal conductivity of underlayers for EUV lithography and its effect on sensitivity of metal oxide resist
| dc.contributor.author | Fallica, Roberto | |
| dc.contributor.author | De Simone, Danilo | |
| dc.contributor.author | Hopkins, Patrick E. | |
| dc.contributor.author | Jones, Andrew | |
| dc.contributor.author | Gaskinsc, John | |
| dc.contributor.imecauthor | Fallica, Roberto | |
| dc.contributor.imecauthor | De Simone, Danilo | |
| dc.contributor.orcidimec | Fallica, Roberto::0000-0003-4523-9624 | |
| dc.contributor.orcidimec | De Simone, Danilo::0000-0003-3927-5207 | |
| dc.date.accessioned | 2025-07-31T03:59:32Z | |
| dc.date.available | 2025-07-31T03:59:32Z | |
| dc.date.issued | 2025 | |
| dc.description.wosFundingText | This work has been enabled in part by the NanoIC pilot line. The acquisition and operation are jointly funded by the Chips Joint Undertaking, through the European Union's Digital Europe (101183266) and Horizon Europe programs (101183277), as well as by the participating states Belgium (Flanders), France, Germany, Finland, Ireland and Romania (www.nanoic-project.eu). Views and opinions expressed are however those of the authors only and do not necessarily reflect those of the European Union or Chips Joint Undertaking. Neither the European Union nor the granting authority can be held responsible for them. | |
| dc.identifier.doi | 10.1117/12.3051713 | |
| dc.identifier.eisbn | 978-1-5106-8635-9 | |
| dc.identifier.isbn | 978-1-5106-8634-2 | |
| dc.identifier.issn | 0277-786X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/45977 | |
| dc.publisher | SPIE-INT SOC OPTICAL ENGINEERING | |
| dc.source.conference | 2025 Conference on Optical and EUV Nanolithography | |
| dc.source.conferencedate | FEB 24-27, 2025 | |
| dc.source.conferencelocation | San Jose | |
| dc.source.numberofpages | 3 | |
| dc.source.volume | 13424 | |
| dc.title | Thermal conductivity of underlayers for EUV lithography and its effect on sensitivity of metal oxide resist | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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