Browsing by Author "Gehoel-van Ansem, W."
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Publication Characterization and optimization of positive tone DUV resists on TiN substrates
Proceedings paper1997, Advances in Resist Technology and Processing XIV, 10/03/1997, p.314-323Publication Lithographic performance of 193 nm resist
Proceedings paper1998, 193nm '98. At the Peak. 4th International Symposium on 193 nm Lithography. Abstracts Book, 14/09/1998, p.P-020