Browsing by Author "Gelpey, S."
Now showing 1 - 1 of 1
- Results Per Page
- Sort Options
Publication Influence of halo implant on leakage current and sheet resistance of ultrashallow p-n junctions
;Faifer, V.N. ;Schroder, D.K. ;Current, M.I. ;Clarysse, Trudo ;Timans, P.J.Zangerle, T.Journal article2007-09, Journal of Vacuum Science and Technology B, (25) 5, p.1588-1592