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Browsing by Author "Gelpey, S."

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    Influence of halo implant on leakage current and sheet resistance of ultrashallow p-n junctions

    Faifer, V.N.
    ;
    Schroder, D.K.
    ;
    Current, M.I.
    ;
    Clarysse, Trudo
    ;
    Timans, P.J.
    ;
    Zangerle, T.
    Journal article
    2007-09, Journal of Vacuum Science and Technology B, (25) 5, p.1588-1592

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