Publication:
Influence of halo implant on leakage current and sheet resistance of ultrashallow p-n junctions
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1912 since deposited on 2021-10-16
3last month
Acq. date: 2026-08-10
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Statistics
Views
1912 since deposited on 2021-10-16
3last month
Acq. date: 2026-08-10
Citations