Publication:
Influence of halo implant on leakage current and sheet resistance of ultrashallow p-n junctions
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1907 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-08
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Views
1907 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-08
Citations