Publication:
Influence of halo implant on leakage current and sheet resistance of ultrashallow p-n junctions
Date
| dc.contributor.author | Faifer, V.N. | |
| dc.contributor.author | Schroder, D.K. | |
| dc.contributor.author | Current, M.I. | |
| dc.contributor.author | Clarysse, Trudo | |
| dc.contributor.author | Timans, P.J. | |
| dc.contributor.author | Zangerle, T. | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Wong, T.M.H. | |
| dc.contributor.author | Moussa, Alain | |
| dc.contributor.author | McCoy, S. | |
| dc.contributor.author | Gelpey, S. | |
| dc.contributor.author | Lerch, W. | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Moussa, Alain | |
| dc.date.accessioned | 2021-10-16T16:06:02Z | |
| dc.date.available | 2021-10-16T16:06:02Z | |
| dc.date.issued | 2007-09 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12148 | |
| dc.source.beginpage | 1588 | |
| dc.source.endpage | 1592 | |
| dc.source.issue | 5 | |
| dc.source.journal | Journal of Vacuum Science and Technology B | |
| dc.source.volume | 25 | |
| dc.title | Influence of halo implant on leakage current and sheet resistance of ultrashallow p-n junctions | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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