Browsing by Author "Gerlach, Marius"
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Publication Dissociative photoionization of EUV lithography photoresist models
Proceedings paper2023, Conference on Advances in Patterning Materials and Processes XL, FEB 27-MAR 01, 2023, p.Art. 124980SPublication Fragmentation of isocyanic acid, HNCO, following core excitation and ionization
Publication X-ray induced fragmentation of fulminic acid, HCNO