Browsing by Author "Ghekiere, John"
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Publication Alternative post-etch polymer removal in a single-wafer platform
Publication Effective post-etch residue removal on low-k films using single wafer processing
Meeting abstract2003, 204th Meeting of the Electrochemical Society: 8th Int. Symp. on Cleaning Technology in Semiconductor Device Manufacturing, 13/10/2003Publication Effective post-etch residue removal on low-K films using single wafer processing
Proceedings paper2004, Cleaning Technology in Semiconductor Device Manufacturing VIII. Proceedings of the International Symposium, 13/10/2003, p.15-22