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Browsing by Author "Giglia, Angelo"

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    Characterizing and modeling electrical response to light for metal based EUV photoresists

    Vaglio Pret, Alessandro  
    ;
    Kocsis, Michael  
    ;
    De Simone, Danilo  
    ;
    Vandenberghe, Geert  
    Proceedings paper
    2016, Advances in Patterning Materials and Processes XXXIII, 21/02/2016, p.977906
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    XAS photoresists electron/quantum yields study with synchrotron light

    De Schepper, Peter  
    ;
    Vaglio Pret, Alessandro  
    ;
    Hansen, Terje
    ;
    Giglia, Angelo
    ;
    Hoshiko, Kenji
    Proceedings paper
    2015, Advances in Patterning Materials and Processes XXXII, 22/02/2015, p.942507

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