Publication:

Characterizing and modeling electrical response to light for metal based EUV photoresists

Date

2016

Proceedings Paper

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Author(s)

Vaglio Pret, Alessandro

;

Kocsis, Michael

;

De Simone, Danilo

;

Vandenberghe, Geert

;

;

;

De Schepper, Peter

;

;

Biafore, John J.

Metrics

1942 since deposited on 2021-10-23

Acq. date: 2025-12-10