Browsing by Author "Gitshin, O."
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Publication Cryogenic etching of porous low-k dielectrics in CF3Br plasma
;Rezvanov, Askar ;Miakonkikh, A. ;Vishnevskiy, A. ;Gitshin, O. ;Rudenko, K.Baklanov, MikhaïlOral presentation2016, Materials for Advanced Metallization conference - MAM