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Browsing by Author "Gitshin, O."

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    Publication

    Cryogenic etching of porous low-k dielectrics in CF3Br plasma

    Rezvanov, Askar
    ;
    Miakonkikh, A.
    ;
    Vishnevskiy, A.
    ;
    Gitshin, O.
    ;
    Rudenko, K.
    ;
    Baklanov, Mikhaïl
    Oral presentation
    2016, Materials for Advanced Metallization conference - MAM

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