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Browsing by Author "Gobrecht, Jens"

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    EUV resist contrast loss determination using interference lithography

    Langner, Andreas
    ;
    Solak, Harun H.
    ;
    Auzelyte, Vaida
    ;
    Ekinci, Yasin
    ;
    David, Christian
    Proceedings paper
    2009, International Symposium on Extreme Ultraviolet Lithography, 18/10/2009

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