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Browsing by Author "Goethals, F."

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    Publication

    Sealed ultra low-k organosilica films with unprecedented electrical and mechanical properties

    Goethals, F.
    ;
    Levrau, E.
    ;
    Pollefeyt, G.
    ;
    Baklanov, Mikhaïl
    ;
    Ciofi, Ivan  
    ;
    Vanstreels, Kris  
    Journal article
    2013, Journal of Materials Chemistry C, (1) 25, p.3961-3966

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