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Browsing by Author "Gomes dos Santos Filho, S."

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    A less critical cleaning procedure for silicon wafer using diluted HF dip and boiling in isopryl alcohol as final steps

    Gomes dos Santos Filho, S.
    ;
    Hasenack, Claus
    ;
    Salay, L. C.
    ;
    Mertens, Paul  
    Journal article
    1995, J. Electrochem. Soc., 142, p.902-907

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