Browsing by Author "Gomes dos Santos Filho, Sebastiao"
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Publication Detailed characterization of the effects of plasma treatments on an advanced 2.0 low-k material
Journal article2013, ECS Journal of Solid State Science and Technology, (2) 5, p.N103-N109Publication Determination of the model for the chemical structure of porous PECVD low-k films
Journal article2015, ECS Journal of Solid State Science and Technology, (4) 1, p.N3140-N3145