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Browsing by Author "Gomme, Steven"

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    Influence of hardware and chemistry on the removal of nano-particles in a megasonic cleaning tank

    Vereecke, Guy  
    ;
    Vos, Rita  
    ;
    Holsteyns, Frank  
    ;
    Schmidt, M.O.
    ;
    Baeyens, Martien
    ;
    Gomme, Steven
    Proceedings paper
    2003, Ultra Clean Processing of Silicon Surfaces 2002 - UCPSS, 16/09/2002, p.143-147

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