Publication:

Influence of hardware and chemistry on the removal of nano-particles in a megasonic cleaning tank

Date

2003
Proceedings Paper
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Author(s)

Vereecke, Guy  
;
Vos, Rita  
;
Holsteyns, Frank  
;
Schmidt, M.O.
;
Baeyens, Martien
;
Gomme, Steven
;
Snow, Jim
;
Coenen, V.
;
Mertens, Paul  
;
Bauer, T.
;
Heyns, Marc  

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