Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Influence of hardware and chemistry on the removal of nano-particles in a megasonic cleaning tank
Publication:
Influence of hardware and chemistry on the removal of nano-particles in a megasonic cleaning tank
Date
2003
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
7809.pdf
285.81 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vereecke, Guy
;
Vos, Rita
;
Holsteyns, Frank
;
Schmidt, M.O.
;
Baeyens, Martien
;
Gomme, Steven
;
Snow, Jim
;
Coenen, V.
;
Mertens, Paul
;
Bauer, T.
;
Heyns, Marc
Journal
Abstract
Description
Metrics
Downloads
1
since deposited on 2021-10-15
Acq. date: 2025-10-23
Views
2036
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Downloads
1
since deposited on 2021-10-15
Acq. date: 2025-10-23
Views
2036
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations