Browsing by Author "Gopalan, P."
Now showing 1 - 2 of 2
- Results per page
- Sort Options
Publication CD control using SiON BARL processing for sub 0.25µm lithography
Oral presentation1998, MNE 98 - Micro- and Nano-Engineering Conference; 22-24 Sept. 1998; Leuven, Belgium.Publication CD control using SiON BARL processing for sub-0.25μm lithography
Journal article1999, Microelectronic Engineering, (46) 1_4, p.51-54