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Browsing by Author "Gopinath, Sanjaj"

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    Dielectric liner reliability in via-middle through silicon vias with 3 micron diameter

    Li, Yunlong  
    ;
    Van Huylenbroeck, Stefaan  
    ;
    Roussel, Philippe  
    ;
    Brouri, Mohand
    ;
    Gopinath, Sanjaj
    Journal article
    2016, Microelectronic Engineering, 156, p.37-40

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