Publication:

Dielectric liner reliability in via-middle through silicon vias with 3 micron diameter

Date

2016

Journal article

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Author(s)

;

Van Huylenbroeck, Stefaan

;

Roussel, Philippe

;

;

Gopinath, Sanjaj

;

M. Anjos, Daniela

;

Thorum, Matthew

;

;

;

;

Journal

Microelectronic Engineering

Statistics

1988 since deposited on 2021-10-23

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Acq. date: 2026-03-17