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Browsing by Author "Gornev, E.S."

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    Area selective grafting of siloxane molecules on low-k dielectric with resepct to copper surface

    Rezvanov, Askar
    ;
    Gornev, E.S.
    ;
    de Marneffe, Jean-Francois  
    ;
    Armini, Silvia  
    Journal article
    2019, Applied Surface Science, 476, p.317-324

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