Browsing by Author "Goryll, M."
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Publication Enhancement of the relaxation of SiGe layers by He ion implantation using a delta-Si:C layer
Oral presentation2007, MRS 2007 Spring Meeting Symposium F: Semiconductor Defect Engineering - Materials, Synthetic Structures and Devices IIPublication Fabrication and characterization of strained Si-on-insulator (sSOI)
Proceedings paper2007, 8th European Workshop on ULtimate Integration of Silicon - ULIS, 14/03/2007Publication Ge island evolution during growth, in-situ anneal, and Si capping in an industrial CVD reactor
Proceedings paper2001, Amorphous and Heterogeneous Silicon-Based Films, 16/04/2001, p.A8.8.1-A8.8.6Publication Influence of grown-in defects on the optical and electrical properties of Si/Si 1-xGex/Si heterostructures
Journal article1998, Thin Solid Films, 336, p.227-231Publication Structural and optical properties of Ge islands grown in an industrial chemical vapor deposition reactor
Journal article2001, Journal of Applied Physics, (90) 5, p.2565-2574